Dual-Mass Linear Vibration Silicon-Based MEMS Gyroscope (1st ed. 2023)
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- Synopsis
- This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
- Copyright:
- 2023
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9789811992476
- Related ISBNs:
- 9789811992469
- Publisher:
- Springer Nature Singapore
- Date of Addition:
- 05/12/23
- Copyrighted By:
- National Defense Industry Press
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.