Handbook of Silicon Semiconductor Metrology
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- Synopsis
- Containing more than 300 equations and nearly 500 drawings, photographs, and micrographs,this reference surveys key areas such as optical measurements and in-line calibration methods. It describes cleanroom-based measurement technology used during the manufacture of silicon integrated circuits and covers model-based, critical dimension, overlay
- Copyright:
- 2001
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9781135554835
- Related ISBNs:
- 9780824705060, 9780367397166, 9780429207655, 9780203904541, 9781135554798
- Publisher:
- CRC Press
- Date of Addition:
- 12/08/24
- Copyrighted By:
- Marcel Dekker, Inc.
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
- Edited by:
- Alain C. Diebold