Run-to-Run Control in Semiconductor Manufacturing (1)
By: and and
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- Synopsis
- Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.
- Copyright:
- 2001
Book Details
- Book Quality:
- Publisher Quality
- Book Size:
- 368 Pages
- ISBN-13:
- 9781351836128
- Related ISBNs:
- 9781315220239, 9781420040661, 9781351827430, 9780849311789
- Publisher:
- CRC Press
- Date of Addition:
- 02/01/25
- Copyrighted By:
- CRC Press LLC
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
- Edited by:
- James Moyne
- Edited by:
- Enrique del Castillo
- Edited by:
- Arnon M. Hurwitz
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- by Enrique Del Castillo
- by James Moyne
- by Arnon Max Hurwitz
- in Nonfiction
- in Technology